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Title: | Plasma Oxidized Suspended Core-Shell Nanostructures for High Performance Metal Oxide Gas sensors |
Authors: | Benedict, Samatha |
Keywords: | EEE Core-shell metal-metal oxide nanostructure Gas sensor Plasma oxidation |
Issue Date: | 2019 |
Publisher: | IEEE |
Abstract: | We report on the novel technique of creating core-shell metal-metal oxide high performance gas sensors using plasma oxidation of a suspended metal thin film. We demonstrate that this technique is very generic by realizing Pt-PtOx and W-WOx nanostructured sensors. The optimization technique for plasma oxidation is elucidated. We also propose an improvisation technique to create nano discs on top of suspended core-shell metal-metal oxide sensor to further enhance the performance. |
URI: | https://ieeexplore.ieee.org/document/8731180 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/10167 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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