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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Rao, V. Ramgopal | - |
dc.date.accessioned | 2023-10-23T06:14:33Z | - |
dc.date.available | 2023-10-23T06:14:33Z | - |
dc.date.issued | 2017-06 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/document/7891598 | - |
dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12588 | - |
dc.description.abstract | Nano-electro-mechanical (NEM) relays play a very important role in ultra-low standby power and ultra-low power vapor phase gas sensor for Internet-of-Things sensor applications. In this paper, for the first time, we demonstrate a multi-functional fully-CMOS compatible titanium-based NEM relay with 1.8V actuation voltage, ~100Ω R ON , 50ns turn ON delay, and 10 9 ON/OFF current ratio in the ambient conditions. The innovative feature of this paper lies on the novel combination of grayscale electron beam lithography and a bi-layer lift-off process at room temperature (RT) to realize an NEM relay. This novel combination facilitates easy release of structures with an air gap of 25nm and a beam size of 1μm × 1.5μm. As an example, using the proposed self-purging NEM relay, a vapor phase gas sensing application is successfully demonstrated for explosives detection in an ambient air at RT. | en_US |
dc.language.iso | en | en_US |
dc.publisher | IEEE | en_US |
dc.subject | EEE | en_US |
dc.subject | Nano-electro-mechanical (NEM) relay | en_US |
dc.subject | Ultralow-standby-power (ULSTP) | en_US |
dc.subject | Internet-of-Things (IoT) | en_US |
dc.subject | Actuation voltage | en_US |
dc.subject | CMOS compatible | en_US |
dc.subject | Reliability | en_US |
dc.subject | Explosives sensing | en_US |
dc.title | Multi-Functional CMOS Compatible Nano-Electro-Mechanical Relays for Vapor Phase Explosive Detection | en_US |
dc.type | Article | en_US |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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