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Title: | Multi-Functional CMOS Compatible Nano-Electro-Mechanical Relays for Vapor Phase Explosive Detection |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Nano-electro-mechanical (NEM) relay Ultralow-standby-power (ULSTP) Internet-of-Things (IoT) Actuation voltage CMOS compatible Reliability Explosives sensing |
Issue Date: | Jun-2017 |
Publisher: | IEEE |
Abstract: | Nano-electro-mechanical (NEM) relays play a very important role in ultra-low standby power and ultra-low power vapor phase gas sensor for Internet-of-Things sensor applications. In this paper, for the first time, we demonstrate a multi-functional fully-CMOS compatible titanium-based NEM relay with 1.8V actuation voltage, ~100Ω R ON , 50ns turn ON delay, and 10 9 ON/OFF current ratio in the ambient conditions. The innovative feature of this paper lies on the novel combination of grayscale electron beam lithography and a bi-layer lift-off process at room temperature (RT) to realize an NEM relay. This novel combination facilitates easy release of structures with an air gap of 25nm and a beam size of 1μm × 1.5μm. As an example, using the proposed self-purging NEM relay, a vapor phase gas sensing application is successfully demonstrated for explosives detection in an ambient air at RT. |
URI: | https://ieeexplore.ieee.org/document/7891598 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12588 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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