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Title: | A Novel TCAD based Thermal Extraction Approach for Nano-scale FinFETs |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Fin-shaped FET (FinFET) Self-heating effects (SHEs) Silicon on insulator (SOI) |
Issue Date: | Feb-2017 |
Publisher: | IEEE |
Abstract: | Self-heating and thermal modeling in fin-shaped FETs (FinFETs) are studied in this brief using calibrated 3-D TCAD simulations. Using the second order R th C th network extraction, we demonstrate for the first time a simple method for the modeling of thermal resistances and capacitances for BSIMCMG compact models using small-signal ac capacitance method. We show that the extraction of thermal time constants using the second-order R th C th method is superior to the other techniques used in the literature. Using this technique, we extract the thermal time constants for FinFETs to be in the order of a few nano/pico seconds. |
URI: | https://ieeexplore.ieee.org/document/7845592 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12591 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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