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Title: | Plastic deformation study of vertical Zinc oxide nanowires for polymer cantilever based sensor applications |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Nanowires Zinc oxide Young's modulus Encapsulation |
Issue Date: | Jul-2014 |
Publisher: | IEEE |
Abstract: | In this letter, the mechanical properties of piezoelectric ZnO nanowire (NW) films have been measured using a nanoindentation technique. We demonstrated a fabrication process to embed this NW film inside a polymeric (SU-8) cantilever. Mechanical properties of this SU-8/ZnO NW film and cantilever have been measured. The ZnO NWs have been grown vertically using a low-temperature chemical synthesis. The observed value of Young's modulus for ZnO NW is in the range 72-93 GPa. After embedding this NW film inside a polymer matrix, the Young's modulus value was reduced to the range 5-19 GPa. The mechanical behavior of the NW-embedded cantilever has also been investigated using the nanoindentation technique. These cantilevers have been shown to be suitable for surface stress-sensing applications. |
URI: | https://ieeexplore.ieee.org/document/6807711 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12627 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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