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Title: | ZnO Nanowire Embedded Strain Sensing Cantilever: A New Ultra-Sensitive Technology Platform |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Microcantilevers ZnO nanowire Sensors |
Issue Date: | Oct-2013 |
Publisher: | IEEE |
Abstract: | A novel ultra sensitive micro-cantilever-based technology platform was developed in this letter for strain sensing applications. Sensing mechanism is based on electrical conduction through the ZnO nanowires embedded inside a SU-8 polymer cantilever beam. The lower Young's modulus of the polymer and the higher strain sensitivity of ZnO nanowires are used to improve the performance of these micro-cantilever devices. Deflection sensitivity of this technology is measured to be 128 ppm/nm. Besides the electromechanical characterization, mechanical characterization has also been performed to measure the resonant frequency of these microcantilever devices, which is shown to be in a few tens of kilohertz range, suitable for nanomechanical sensing applications. |
URI: | https://ieeexplore.ieee.org/document/6544602 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12639 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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