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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Rao, V. Ramgopal | - |
dc.date.accessioned | 2023-10-26T09:28:22Z | - |
dc.date.available | 2023-10-26T09:28:22Z | - |
dc.date.issued | 2013-10 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/document/6544602 | - |
dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12639 | - |
dc.description.abstract | A novel ultra sensitive micro-cantilever-based technology platform was developed in this letter for strain sensing applications. Sensing mechanism is based on electrical conduction through the ZnO nanowires embedded inside a SU-8 polymer cantilever beam. The lower Young's modulus of the polymer and the higher strain sensitivity of ZnO nanowires are used to improve the performance of these micro-cantilever devices. Deflection sensitivity of this technology is measured to be 128 ppm/nm. Besides the electromechanical characterization, mechanical characterization has also been performed to measure the resonant frequency of these microcantilever devices, which is shown to be in a few tens of kilohertz range, suitable for nanomechanical sensing applications. | en_US |
dc.language.iso | en | en_US |
dc.publisher | IEEE | en_US |
dc.subject | EEE | en_US |
dc.subject | Microcantilevers | en_US |
dc.subject | ZnO nanowire | en_US |
dc.subject | Sensors | en_US |
dc.title | ZnO Nanowire Embedded Strain Sensing Cantilever: A New Ultra-Sensitive Technology Platform | en_US |
dc.type | Article | en_US |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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