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Please use this identifier to cite or link to this item: http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12659
Title: Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer
Authors: Rao, V. Ramgopal
Keywords: EEE
Photosensitive polymer
ZnO nanoparticles
Piezoelectrics
Issue Date: Dec-2011
Publisher: Wiley
Abstract: Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications
URI: https://onlinelibrary.wiley.com/doi/abs/10.1002/pssr.201105538
http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12659
Appears in Collections:Department of Electrical and Electronics Engineering

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