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Title: | Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Photosensitive polymer ZnO nanoparticles Piezoelectrics |
Issue Date: | Dec-2011 |
Publisher: | Wiley |
Abstract: | Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications |
URI: | https://onlinelibrary.wiley.com/doi/abs/10.1002/pssr.201105538 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12659 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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