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Please use this identifier to cite or link to this item: http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12659
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dc.contributor.authorRao, V. Ramgopal-
dc.date.accessioned2023-10-27T03:59:11Z-
dc.date.available2023-10-27T03:59:11Z-
dc.date.issued2011-12-
dc.identifier.urihttps://onlinelibrary.wiley.com/doi/abs/10.1002/pssr.201105538-
dc.identifier.urihttp://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12659-
dc.description.abstractLocal piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applicationsen_US
dc.language.isoenen_US
dc.publisherWileyen_US
dc.subjectEEEen_US
dc.subjectPhotosensitive polymeren_US
dc.subjectZnO nanoparticlesen_US
dc.subjectPiezoelectricsen_US
dc.titleLocal piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymeren_US
dc.typeArticleen_US
Appears in Collections:Department of Electrical and Electronics Engineering

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