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http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12660Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Rao, V. Ramgopal | - |
| dc.date.accessioned | 2023-10-27T04:09:41Z | - |
| dc.date.available | 2023-10-27T04:09:41Z | - |
| dc.date.issued | 2012-04 | - |
| dc.identifier.uri | https://ieeexplore.ieee.org/document/6118300 | - |
| dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12660 | - |
| dc.description.abstract | This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | IEEE | en_US |
| dc.subject | EEE | en_US |
| dc.subject | Microelectromechanical systems (MEMS) | en_US |
| dc.subject | Nanocomposites | en_US |
| dc.subject | Piezoelectrics | en_US |
| dc.subject | SU-8 polymer | en_US |
| dc.title | A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications | en_US |
| dc.type | Article | en_US |
| Appears in Collections: | Department of Electrical and Electronics Engineering | |
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