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http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12660| Title: | A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications |
| Authors: | Rao, V. Ramgopal |
| Keywords: | EEE Microelectromechanical systems (MEMS) Nanocomposites Piezoelectrics SU-8 polymer |
| Issue Date: | Apr-2012 |
| Publisher: | IEEE |
| Abstract: | This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting |
| URI: | https://ieeexplore.ieee.org/document/6118300 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12660 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
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