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http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12663| Title: | Current Excitation Method for ΔR Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution |
| Authors: | Rao, V. Ramgopal |
| Keywords: | EEE Bidirectional current source Cantilevers Current excitation Piezo resistivity Wheatstone's bridge |
| Issue Date: | Mar-2012 |
| Publisher: | IEEE |
| Abstract: | This paper presents a new highly sensitive (10 μV/ppm) bidirectional current excitation method for piezo-resistive sensor measurements, through excitation of two half bridges for Δ R measurement. The proposed circuit is insensitive to thermoelectric and stray noise effects since it measures the peak-to-peak value of the generated voltage. Measurement results using resistors show that variations as low as 0.3 ppm are measurable from 15°C to 80°C with resistors. As an experimental application, 40 parts per billion variation in gas concentration using piezo-resistive SU-8 microcantilevers is measured by the proposed circuit at room temperature. |
| URI: | https://ieeexplore.ieee.org/document/6086761 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12663 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
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