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http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12700| Title: | Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers |
| Authors: | Rao, V. Ramgopal |
| Keywords: | EEE Microcantilevers Silicon nitride-based |
| Issue Date: | Oct-2009 |
| Publisher: | Springer |
| Abstract: | Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail. |
| URI: | https://link.springer.com/article/10.1007/s12046-009-0036-7 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12700 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
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