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Please use this identifier to cite or link to this item: http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12700
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dc.contributor.authorRao, V. Ramgopal-
dc.date.accessioned2023-10-28T04:52:42Z-
dc.date.available2023-10-28T04:52:42Z-
dc.date.issued2009-10-
dc.identifier.urihttps://link.springer.com/article/10.1007/s12046-009-0036-7-
dc.identifier.urihttp://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12700-
dc.description.abstractMethods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.en_US
dc.language.isoenen_US
dc.publisherSpringeren_US
dc.subjectEEEen_US
dc.subjectMicrocantileversen_US
dc.subjectSilicon nitride-baseden_US
dc.titleBio-functionalization of silicon nitride-based piezo-resistive microcantileversen_US
dc.typeArticleen_US
Appears in Collections:Department of Electrical and Electronics Engineering

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