Please use this identifier to cite or link to this item:
http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/12811| Title: | A TFT embedded cantilever (CantiFET) platform for sensor applications |
| Authors: | Rao, V. Ramgopal |
| Keywords: | EEE Microcantilever ZnO Polymeric cantilevers Piezoresistive |
| Issue Date: | Oct-2013 |
| Publisher: | IEEE |
| Abstract: | This work focusses on the development of a ZnO based piezo-resistive polymer cantilever sensor platform. Two different approaches have been taken, one based on Al-doped ZnO transistor (TFT) embedded in a polymeric micro-cantilever and another with a ZnO nanowire embedded microcantilever. Low Young's modulus of SU-8, low process temperature and high strain sensing capability of ZnO makes this platform an attractive option for sensor applications. For both the approaches, electromechanical and mechanical characterization results are reported in this work. |
| URI: | https://ieeexplore.ieee.org/document/6628191 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12811 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.