A TFT embedded cantilever (CantiFET) platform for sensor applications

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DC Field	Value	Language
dc.contributor.author	Rao, V. Ramgopal	-
dc.date.accessioned	2023-11-02T09:28:27Z	-
dc.date.available	2023-11-02T09:28:27Z	-
dc.date.issued	2013-10	-
dc.identifier.uri	https://ieeexplore.ieee.org/document/6628191	-
dc.identifier.uri	http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12811	-
dc.description.abstract	This work focusses on the development of a ZnO based piezo-resistive polymer cantilever sensor platform. Two different approaches have been taken, one based on Al-doped ZnO transistor (TFT) embedded in a polymeric micro-cantilever and another with a ZnO nanowire embedded microcantilever. Low Young's modulus of SU-8, low process temperature and high strain sensing capability of ZnO makes this platform an attractive option for sensor applications. For both the approaches, electromechanical and mechanical characterization results are reported in this work.	en_US
dc.language.iso	en	en_US
dc.publisher	IEEE	en_US
dc.subject	EEE	en_US
dc.subject	Microcantilever	en_US
dc.subject	ZnO	en_US
dc.subject	Polymeric cantilevers	en_US
dc.subject	Piezoresistive	en_US
dc.title	A TFT embedded cantilever (CantiFET) platform for sensor applications	en_US
dc.type	Article	en_US
Appears in Collections:	Department of Electrical and Electronics Engineering

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