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http://dspace.bits-pilani.ac.in:8080/jspui/handle/123456789/12821| Title: | Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity |
| Authors: | Rao, V. Ramgopal |
| Keywords: | EEE Optimum design SU-8 based accelerometer Cross axis sensitivity Piezoresistive accelerometer |
| Issue Date: | Jun-2010 |
| Publisher: | IEEE |
| Abstract: | The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%. |
| URI: | https://ieeexplore.ieee.org/document/5549364 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12821 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
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