Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity

Please use this identifier to cite or link to this item: http://dspace.bits-pilani.ac.in:8080/jspui/handle/123456789/12821

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DC Field	Value	Language
dc.contributor.author	Rao, V. Ramgopal	-
dc.date.accessioned	2023-11-02T10:41:34Z	-
dc.date.available	2023-11-02T10:41:34Z	-
dc.date.issued	2010-06	-
dc.identifier.uri	https://ieeexplore.ieee.org/document/5549364	-
dc.identifier.uri	http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12821	-
dc.description.abstract	The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%.	en_US
dc.language.iso	en	en_US
dc.publisher	IEEE	en_US
dc.subject	EEE	en_US
dc.subject	Optimum design	en_US
dc.subject	SU-8 based accelerometer	en_US
dc.subject	Cross axis sensitivity	en_US
dc.subject	Piezoresistive accelerometer	en_US
dc.title	Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity	en_US
dc.type	Article	en_US
Appears in Collections:	Department of Electrical and Electronics Engineering

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