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Title: | A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity |
Authors: | Rao, V. Ramgopal |
Keywords: | EEE Acceleration Accelerometers Bridge circuits Piezoresistance Polymers |
Issue Date: | 2010 |
Publisher: | IEEE |
Abstract: | The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement. |
URI: | https://ieeexplore.ieee.org/document/5775073 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12822 |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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