AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition

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DC Field	Value	Language
dc.contributor.author	Dey, Srijata	-
dc.date.accessioned	2024-03-05T06:13:40Z	-
dc.date.available	2024-03-05T06:13:40Z	-
dc.date.issued	1999-04	-
dc.identifier.uri	https://www.sciencedirect.com/science/article/pii/S0169433298006242	-
dc.identifier.uri	http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/14514	-
dc.description.abstract	Polycrystalline CaS thin films were grown on Al2O3 films deposited on Si-wafer using the atomic layer deposition (ALD) technique. The surface structure of these films was studied by AFM and compared with respective SEM images. The polycrystalline film surfaces comprise regular shaped crystallites. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with thickness and growth rate.	en_US
dc.language.iso	en	en_US
dc.publisher	Elsevier	en_US
dc.subject	Physics	en_US
dc.subject	ALD	en_US
dc.subject	Al2O3 on Si	en_US
dc.subject	Atomic force microscope (AFM)	en_US
dc.subject	Polycrystalline film	en_US
dc.title	AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition	en_US
dc.type	Article	en_US
Appears in Collections:	Department of Physics

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