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http://dspace.bits-pilani.ac.in:8080/jspui/handle/123456789/21249| Title: | Investigation of the Properties of Plasma Deposited Silicon Nitride Thin Films |
| Authors: | Chopra, Siddheshwar |
| Keywords: | Physics Plasma Silicon Nitride Thin Films |
| Issue Date: | 2010 |
| Publisher: | BITS PILANI, Pilani campus |
| Description: | Under the Supervision of Prof. Souri Banerjee |
| URI: | http://hdl.handle.net/10603/475974 |
| Appears in Collections: | Department of Physics |
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