Please use this identifier to cite or link to this item:
http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/9003| Title: | Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856 |
| Authors: | Gupta, Navneet |
| Keywords: | EEE Over-Etching Microcantilever |
| Issue Date: | 2012 |
| Publisher: | Trans Tech Publications Ltd |
| Abstract: | In this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart. |
| URI: | https://www.scientific.net/AMR.403-408.3376 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9003 |
| Appears in Collections: | Department of Electrical and Electronics Engineering |
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.