Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856

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DC Field	Value	Language
dc.contributor.author	Gupta, Navneet	-
dc.date.accessioned	2023-02-06T10:22:33Z	-
dc.date.available	2023-02-06T10:22:33Z	-
dc.date.issued	2012	-
dc.identifier.uri	https://www.scientific.net/AMR.403-408.3376	-
dc.identifier.uri	http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9003	-
dc.description.abstract	In this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart.	en_US
dc.language.iso	en	en_US
dc.publisher	Trans Tech Publications Ltd	en_US
dc.subject	EEE	en_US
dc.subject	Over-Etching	en_US
dc.subject	Microcantilever	en_US
dc.title	Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856	en_US
dc.type	Article	en_US
Appears in Collections:	Department of Electrical and Electronics Engineering

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