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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Gupta, Navneet | - |
dc.date.accessioned | 2023-02-06T10:22:33Z | - |
dc.date.available | 2023-02-06T10:22:33Z | - |
dc.date.issued | 2012 | - |
dc.identifier.uri | https://www.scientific.net/AMR.403-408.3376 | - |
dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9003 | - |
dc.description.abstract | In this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Trans Tech Publications Ltd | en_US |
dc.subject | EEE | en_US |
dc.subject | Over-Etching | en_US |
dc.subject | Microcantilever | en_US |
dc.title | Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856 | en_US |
dc.type | Article | en_US |
Appears in Collections: | Department of Electrical and Electronics Engineering |
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