![DSpace logo](/jspui/image/logo.gif)
Please use this identifier to cite or link to this item:
http://dspace.bits-pilani.ac.in:8080/jspui/xmlui/handle/123456789/9907
Title: | T-Shaped Resonating Beam Pressure Sensor |
Authors: | Yenuganti, Sujan |
Keywords: | EEE T-shaped beam Pressure sensor MEMS (Micro-ElectroMechanical Systems) Surface micromachining. |
Issue Date: | 2012 |
Publisher: | IEEE |
Abstract: | A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a Tshaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 μm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz |
URI: | https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=6417139 http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9907 |
Appears in Collections: | Department of Computer Science and Information Systems |
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.