Takahashi, Yasutaka; Tsuda, Katsumi; Sugiyama, Kohzo
(Journal of the Chemical Society : Faraday Transaction - I. The Chemical Society, London. 1981, 77 (05), 1981)
Vapour pyrolysis of ethyl titanate has been performed in order to obtain thin TiO2 films. A selective deposition of rutile films is found to occur when substrate temperatures are below 500°C and the gas phase has a large ...