A silicon island compliant mechanism supported frequency tunable resonating beam based micro pressure sensor is proposed in this work. The sensor consists of a silicon frame with silicon islands supporting a silicon nitride ...

In this article, MEMS-based logic gates such as OR, AND, NOT, NOR, and NAND gates with functionalities similar to the electronic digital devices are designed and simulated. The key feature of these logic devices is that ...

This paper presents the design, modeling, and experimental demonstration of a novel pressure sensor using an AT-cut quartz crystal resonator with beat frequency analysis-based temperature compensation technique. The ...

In this study experimental analysis and control of a PZT based cantilever is performed using Fuzzy-PID controllers. Two PZT patches were attached to the rigid end of the Cantilever beam out of which one was used as an ...

This paper presents modelling and numerical evaluation of a piezo electrically excited clamped–clamped micro beam (CCMB) with cavity as a vibrational energy harvester. The harvester micro beam is made to vibrate at resonance ...

This paper presents the design and testing of a new pressure sensor utilizing a doubly rotated cut piezoelectric langasite (LGS) crystal resonator with temperature compensation. The sensor can measure temperature and ...

The paper presents the design, fabrication, and experimental validation of a new non-contact resonance-based measurement system to measure the thickness of ferromagnetic sheets and their alloys. The measurement system ...

The paper presents design and development of a resonance displacement sensor. The sensor is built with cantilever as a resonator with piezoelectric excitation and sensing in closed loop electronics. The sensor measures the ...

This paper presents the design, fabrication, and experimental demonstration of a portable viscosity measurement system using an AT-cut quartz crystal resonator with a temperature compensation technique. The proposed sensor ...

A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a ...