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A Novel TCAD based Thermal Extraction Approach for Nano-scale FinFETs

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-10-23T06:56:35Z
dc.date.available 2023-10-23T06:56:35Z
dc.date.issued 2017-02
dc.identifier.uri https://ieeexplore.ieee.org/document/7845592
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12591
dc.description.abstract Self-heating and thermal modeling in fin-shaped FETs (FinFETs) are studied in this brief using calibrated 3-D TCAD simulations. Using the second order R th C th network extraction, we demonstrate for the first time a simple method for the modeling of thermal resistances and capacitances for BSIMCMG compact models using small-signal ac capacitance method. We show that the extraction of thermal time constants using the second-order R th C th method is superior to the other techniques used in the literature. Using this technique, we extract the thermal time constants for FinFETs to be in the order of a few nano/pico seconds. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Fin-shaped FET (FinFET) en_US
dc.subject Self-heating effects (SHEs) en_US
dc.subject Silicon on insulator (SOI) en_US
dc.title A Novel TCAD based Thermal Extraction Approach for Nano-scale FinFETs en_US
dc.type Article en_US


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