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Metal-Gate Granularity-Induced Threshold Voltage Variability and Mismatch in Si Gate-All-Around Nanowire n-MOSFETs

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-10-26T04:27:51Z
dc.date.available 2023-10-26T04:27:51Z
dc.date.issued 2014-11
dc.identifier.uri https://ieeexplore.ieee.org/document/6895292
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12624
dc.description.abstract The metal-gate granularity-induced threshold voltage (V T ) variability and V T mismatch in Si gate-all-around (GAA) nanowire n-MOSFETs (n-NWFETs) are studied using coupled 3-D statistical device simulations considering quantum corrected room temperature drift-diffusion transport. The impact of metal-gate crystal grain size on linear and saturation mode V T variability are analyzed. The V T mismatch study predicts lower mismatch figure of merit (A VT ) in TiN-gated Si GAA n-NWFETs compared with the reported experimental mismatch data for TiN-gated Si FinFETs. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Gate-all-around (GAA) en_US
dc.subject Metal-gate granularity (MGG) en_US
dc.subject Silicon nanowire FET en_US
dc.subject Work function (WF) en_US
dc.title Metal-Gate Granularity-Induced Threshold Voltage Variability and Mismatch in Si Gate-All-Around Nanowire n-MOSFETs en_US
dc.type Article en_US


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