| dc.contributor.author |
Rao, V. Ramgopal |
|
| dc.date.accessioned |
2023-10-26T09:44:20Z |
|
| dc.date.available |
2023-10-26T09:44:20Z |
|
| dc.date.issued |
2013-02 |
|
| dc.identifier.uri |
https://pubs.aip.org/aip/apl/article/102/6/064101/26033/Al-doped-ZnO-thin-film-transistor-embedded-micro |
|
| dc.identifier.uri |
http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12643 |
|
| dc.description.abstract |
In this work, an aluminium-doped zinc oxide (AZO) thin film transistor, embedded in a polymer micro-cantilever, is demonstrated for nano-mechanical sensing applications. This device senses the surface stress due to a change in the carrier mobility of the semi-conducting layer. Due to the low Young's modulus and high strain sensitivity of the AZO layer, this micro-cantilever shows a deflection sensitivity of 116 ppm per nanometer of deflection. Also, mechanical characterization of these devices shows that the resonance frequency is in the range of a few tens of kilohertz which is suitable for sensor applications. |
en_US |
| dc.language.iso |
en |
en_US |
| dc.publisher |
AIP |
en_US |
| dc.subject |
EEE |
en_US |
| dc.subject |
ZnO nanowire |
en_US |
| dc.subject |
Micro-cantilever |
en_US |
| dc.subject |
Aluminium-doped zinc oxide (AZO) |
en_US |
| dc.title |
Al-doped ZnO thin-film transistor embedded micro-cantilever as a piezoresistive sensor |
en_US |
| dc.type |
Article |
en_US |