Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing

dc.contributor.author	Rao, V. Ramgopal
dc.date.accessioned	2023-10-26T10:22:50Z
dc.date.available	2023-10-26T10:22:50Z
dc.date.issued	2012-07
dc.identifier.uri	https://ieeexplore.ieee.org/document/6168274
dc.identifier.uri	http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12649
dc.description.abstract	Carbon monoxide detection is required for various healthcare, environmental, and engineering applications. In this paper, 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23H-porphyrin iron(III) chloride (Fe(III)porphyrin) coated on a piezoresistive SU-8 microcantilever has been used as a CO sensor. Rapid detection of CO down to 2 ppm has been observed with aforementioned sensors. Cantilevers without Fe(III)porphyrin have not responded to CO exposure. Fe(III)porphyrin-coated cantilever selectivity toward CO has been analyzed by measuring the sensor response to various gases such as N 2 , CO 2 , O 2 , ethanolamine, N 2 O, and moisture. The sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.	en_US
dc.language.iso	en	en_US
dc.publisher	IEEE	en_US
dc.subject	EEE	en_US
dc.subject	Cantilevers	en_US
dc.subject	Carbon monoxide	en_US
dc.subject	Iron porphyrin	en_US
dc.subject	Piezoresistance	en_US
dc.subject	Sensors	en_US
dc.title	Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing	en_US
dc.type	Article	en_US

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