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Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-10-27T03:59:11Z
dc.date.available 2023-10-27T03:59:11Z
dc.date.issued 2011-12
dc.identifier.uri https://onlinelibrary.wiley.com/doi/abs/10.1002/pssr.201105538
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12659
dc.description.abstract Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications en_US
dc.language.iso en en_US
dc.publisher Wiley en_US
dc.subject EEE en_US
dc.subject Photosensitive polymer en_US
dc.subject ZnO nanoparticles en_US
dc.subject Piezoelectrics en_US
dc.title Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer en_US
dc.type Article en_US


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