dc.contributor.author | Rao, V. Ramgopal | |
dc.date.accessioned | 2023-10-27T03:59:11Z | |
dc.date.available | 2023-10-27T03:59:11Z | |
dc.date.issued | 2011-12 | |
dc.identifier.uri | https://onlinelibrary.wiley.com/doi/abs/10.1002/pssr.201105538 | |
dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12659 | |
dc.description.abstract | Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications | en_US |
dc.language.iso | en | en_US |
dc.publisher | Wiley | en_US |
dc.subject | EEE | en_US |
dc.subject | Photosensitive polymer | en_US |
dc.subject | ZnO nanoparticles | en_US |
dc.subject | Piezoelectrics | en_US |
dc.title | Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer | en_US |
dc.type | Article | en_US |
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