| dc.contributor.author |
Rao, V. Ramgopal |
|
| dc.date.accessioned |
2023-10-27T04:09:41Z |
|
| dc.date.available |
2023-10-27T04:09:41Z |
|
| dc.date.issued |
2012-04 |
|
| dc.identifier.uri |
https://ieeexplore.ieee.org/document/6118300 |
|
| dc.identifier.uri |
http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12660 |
|
| dc.description.abstract |
This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting |
en_US |
| dc.language.iso |
en |
en_US |
| dc.publisher |
IEEE |
en_US |
| dc.subject |
EEE |
en_US |
| dc.subject |
Microelectromechanical systems (MEMS) |
en_US |
| dc.subject |
Nanocomposites |
en_US |
| dc.subject |
Piezoelectrics |
en_US |
| dc.subject |
SU-8 polymer |
en_US |
| dc.title |
A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications |
en_US |
| dc.type |
Article |
en_US |