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Current Excitation Method for ΔR Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-10-27T06:46:52Z
dc.date.available 2023-10-27T06:46:52Z
dc.date.issued 2012-03
dc.identifier.uri https://ieeexplore.ieee.org/document/6086761
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12663
dc.description.abstract This paper presents a new highly sensitive (10 μV/ppm) bidirectional current excitation method for piezo-resistive sensor measurements, through excitation of two half bridges for Δ R measurement. The proposed circuit is insensitive to thermoelectric and stray noise effects since it measures the peak-to-peak value of the generated voltage. Measurement results using resistors show that variations as low as 0.3 ppm are measurable from 15°C to 80°C with resistors. As an experimental application, 40 parts per billion variation in gas concentration using piezo-resistive SU-8 microcantilevers is measured by the proposed circuit at room temperature. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Bidirectional current source en_US
dc.subject Cantilevers en_US
dc.subject Current excitation en_US
dc.subject Piezo resistivity en_US
dc.subject Wheatstone's bridge en_US
dc.title Current Excitation Method for ΔR Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution en_US
dc.type Article en_US


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