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Analysis of dependence of short-channel effects in double-gate MOSFETs on channel thickness

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-10-27T11:10:50Z
dc.date.available 2023-10-27T11:10:50Z
dc.date.issued 2010-03
dc.identifier.uri https://www.sciencedirect.com/science/article/abs/pii/S0026271410000053
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12687
dc.description.abstract A systematic study of the dependence of short-channel effects (SCEs) on the channel thickness (Tch) of double-gate MOSFETs revealed that there is a particular range of Tch in which SCEs are significantly degraded compared to those of conventional planar MOSFETs. This phenomenon was found to originate from the electric field penetrating the channel region from the drain due to the disappearance of a neutral region in the channel. This dependence of this phenomenon on device parameters such as the channel doping concentration (Nc), the equivalent oxide thickness (EOT) and the gate length (Lg) was examined. The degradation of SCEs due to an inappropriate Tch was found to become more significant as Nc and Lg are reduced. en_US
dc.language.iso en en_US
dc.publisher Elsevier en_US
dc.subject EEE en_US
dc.subject MOSFETs en_US
dc.subject Short-channel effects (SCEs) en_US
dc.title Analysis of dependence of short-channel effects in double-gate MOSFETs on channel thickness en_US
dc.type Article en_US


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