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A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-11-02T10:49:11Z
dc.date.available 2023-11-02T10:49:11Z
dc.date.issued 2010
dc.identifier.uri https://ieeexplore.ieee.org/document/5775073
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12822
dc.description.abstract The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Acceleration en_US
dc.subject Accelerometers en_US
dc.subject Bridge circuits en_US
dc.subject Piezoresistance en_US
dc.subject Polymers en_US
dc.title A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity en_US
dc.type Article en_US


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