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Characterization of interface and oxide traps in Ge pMOSFETs based on DCIV technique

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-11-03T08:59:35Z
dc.date.available 2023-11-03T08:59:35Z
dc.date.issued 2009-06
dc.identifier.uri https://ieeexplore.ieee.org/document/5166133
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12842
dc.description.abstract The interface trap density of fresh TiN/TaN gated HfO 2 /SiO 2 /Si/epi-Ge pMOSFETs is measured using the DCIV technique. Its temperature dependence is also discussed here. We observe a polarity dependent DCIV peak shift. The bias temperature stress induced interface trapped charge and oxide trapped charge shifts are also systematically investigated in this work. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Ge pMOSFET en_US
dc.subject Interface trap en_US
dc.subject Oxide trap en_US
dc.title Characterization of interface and oxide traps in Ge pMOSFETs based on DCIV technique en_US
dc.type Article en_US


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