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Characterization of lateral asymmetric channel (LAC) thin film SOI MOSFETs

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-11-07T06:36:09Z
dc.date.available 2023-11-07T06:36:09Z
dc.date.issued 2001-10
dc.identifier.uri https://ieeexplore.ieee.org/document/981564
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12888
dc.description.abstract This paper presents results on the characterization of Lateral Asymmetric Channel (LAC) thin film silicon-on-insulator (SOI) MOSFETs. These devices are compared with conventional SOI MOSFETs having uniform channel doping. The measurements have been taken for a number of channel lengths, silicon film thicknesses, and tilt angles of implantation. The aspects studied include threshold voltage roll-off, kink effect, gate induced drain leakage (GIDL) and parasitic bipolar transistor action. Measurements have been supplemented by device simulations. The LAC devices show excellent characteristics, with many advantages over the conventional devices. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.subject EEE en_US
dc.subject Los Angeles Council en_US
dc.subject Semiconductor films en_US
dc.subject Threshold voltage en_US
dc.subject Length measurement en_US
dc.subject Thickness measurement en_US
dc.title Characterization of lateral asymmetric channel (LAC) thin film SOI MOSFETs en_US
dc.type Article en_US


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