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High Field Stressing Effects in JVD Nitride Capacitors

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dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-11-07T06:40:59Z
dc.date.available 2023-11-07T06:40:59Z
dc.date.issued 2001
dc.identifier.issn 0277-786X
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12889
dc.description.abstract The performance of Jet Vapour Deposited (JVD) Silicon Nitride devices under high field stressing is reported in this paper. Border traps were generated when n-substrate capacitors were stressed with negative gate voltages. Also, an increase in bulk positive charges as well as interface trap density was observed. These results indicate that stressing under negative gate voltages may cause long term reliability problems in Metal-Nitride-Semiconductor (MNS) devices'. Stressing with positive gate voltage, however, does not show any significant degradation. en_US
dc.language.iso en en_US
dc.publisher SPIE en_US
dc.subject EEE en_US
dc.subject Border traps en_US
dc.subject Interface en_US
dc.subject Oxides en_US
dc.subject Radiation en_US
dc.subject Bias en_US
dc.title High Field Stressing Effects in JVD Nitride Capacitors en_US
dc.type Article en_US


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