DSpace Repository

Radiation Induced Interface State Generation in Nitrided and Reoxidized Nitrided Gate Oxides

Show simple item record

dc.contributor.author Rao, V. Ramgopal
dc.date.accessioned 2023-11-08T05:35:14Z
dc.date.available 2023-11-08T05:35:14Z
dc.date.issued 1992-01
dc.identifier.uri https://pubs.aip.org/aip/jap/article-abstract/71/2/1029/394576/Radiation-induced-interface-state-generation-in?redirectedFrom=fulltext
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12909
dc.description.abstract Reoxidized nitrided oxide is compared with nitrided oxides and dry SiO2 for radiation‐induced interface‐state generation (ΔDitm) and midgap voltage shifts (ΔVmg). The suppression of ΔDitm observed with heavy nitridation or reoxidation is explained in terms of the trapped‐hole recombination model together with the shifting of the location of the trapped positive charge away from the Si interface. This model can also explain the effect of nitrogen annealing on nitrided oxides.   en_US
dc.language.iso en en_US
dc.publisher AIP en_US
dc.subject EEE en_US
dc.subject Reoxidized nitrided SiO2 en_US
dc.subject Nitrided oxides en_US
dc.title Radiation Induced Interface State Generation in Nitrided and Reoxidized Nitrided Gate Oxides en_US
dc.type Article en_US


Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record

Search DSpace


Advanced Search

Browse

My Account