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Electron beam deposited thin titanium films and its thermal oxidation to form rutile TiO2 thin films

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dc.contributor.author Gangopadhyay, Subhashis
dc.date.accessioned 2025-03-20T10:47:19Z
dc.date.available 2025-03-20T10:47:19Z
dc.date.issued 2024
dc.identifier.uri https://pubs.aip.org/aip/acp/article/3149/1/020040/3308557/Electron-beam-deposited-thin-titanium-films-and
dc.identifier.uri http://dspace.bits-pilani.ac.in:8080/jspui/handle/123456789/18444
dc.description.abstract Smooth and homogeneous titanium (Ti) thin films are formed on quartz substrate using a vacuum assisted electron beam evaporation technique. Afterwards, controlled thermal oxidation of these Ti films are performed to grow a uniform titanium dioxide (TiO2) layer. Structural, morphological, chemical and optical properties of these metal and oxide layers have been investigated using various surface characterization techniques such as x-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy and UV-Vis spectroscopy. Formation of rutile TiO2 phase is confirmed from the XRD and Raman spectroscopy, after thermal oxidation above 400°C. SEM imaging suggests the formation of a smooth and homogeneous Ti as well as TiO2 layers which appear with a nanometer scale granular surface morphology. All findings are explained in terms of surface thermodynamics and chemical reactivity. en_US
dc.language.iso en en_US
dc.publisher AIP en_US
dc.subject Physics en_US
dc.subject X-Ray diffraction (XRD) en_US
dc.subject UV-Vis spectroscopy. en_US
dc.title Electron beam deposited thin titanium films and its thermal oxidation to form rutile TiO2 thin films en_US
dc.type Article en_US


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