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A Vapor Phase Self-Assembly of Porphyrin Monolayer as a Copper Diffusion Barrier for Back-End-of-Line CMOS Technologies
Rao, V. Ramgopal
(
IEEE
,
2016
)
Effect of Central Metal Ion on Molecular Dipole in Porphyrin Self-Assembled Monolayers
Rao, V. Ramgopal
(
American Scientific Publishers
,
2012-07
)
Porphyrin Self-Assembled Monolayer as a Copper Diffusion Barrier for Advanced CMOS Technologies
Rao, V. Ramgopal
(
IEEE
,
2012-07
)
Modification of Electronic Properties of Graphene with Porphyrin Self-Assembled Monolayers and Photoinduced Interactions
Rao, V. Ramgopal
(
American Scientific Publishers
,
2012-07
)
Variable Interface Dipoles of Metallated Porphyrin Self-Assembled Monolayers for Metal-Gate Work Function Tuning in Advanced CMOS Technologies
Rao, V. Ramgopal
(
IEEE
,
2010-02
)
Bottom-up method for work function tuning in high-k/metal gate stacks in advanced CMOS technologies
Rao, V. Ramgopal
(
IEEE
,
2011-08
)
Self assembled monolayer applications for nano-scale CMOS
Rao, V. Ramgopal
(
IEEE
,
2016
)
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Author
Rao, V. Ramgopal (7)
Subject
EEE (7)
Self-assembled monolayer (SAM) (7)
Porphyrin (3)
CMOS (2)
Copper diffusion (2)
Copper interconnects (2)
Dipole (2)
Work function (2)
Work function tuning (2)
Barrier layers (1)
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Date Issued
2012 (3)
2016 (2)
2010 (1)
2011 (1)
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No (7)