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Browsing Department of Computer Science and Information Systems by Subject "MEMS (Micro-ElectroMechanical Systems)"

Browsing Department of Computer Science and Information Systems by Subject "MEMS (Micro-ElectroMechanical Systems)"

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  • Yenuganti, Sujan (IEEE, 2012)
    A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a ...

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