| dc.contributor.author | Chopra, Siddheshwar | |
| dc.date.accessioned | 2026-05-06T04:59:58Z | |
| dc.date.available | 2026-05-06T04:59:58Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | http://hdl.handle.net/10603/475974 | |
| dc.description | Under the Supervision of Prof. Souri Banerjee | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | BITS PILANI, Pilani campus | en_US |
| dc.subject | Physics | en_US |
| dc.subject | Plasma | en_US |
| dc.subject | Silicon Nitride | en_US |
| dc.subject | Thin Films | en_US |
| dc.title | Investigation of the Properties of Plasma Deposited Silicon Nitride Thin Films | en_US |
| dc.type | Thesis | en_US |
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