Abstract:
The recent advances in microelectronics technology and the tremendous growth of the newlinewireless-communication market have drawn muchinterest into radio-frequency MEMS newlinedevices (RF MEMS) such as filters, oscillators, and switches, which constitute the newlineubiquitous components of radio front systems. This thesis presents material selection, newlinedesign, and characterization of a capacitive micro-machined resonator and filter. The newlineresonator structures such as disk and Lame are studied in detail. Effects of coupling newlinebeams in filter response are analyzed with two different coupling structures such as newlinestraight and V-shaped beams. newlineMaterial selection and design are the two important aspects which govern the performance newlineof resonators and filters like any other MEMS device. In view of the recent advances and newlinetrends in device miniaturization, the fabrication and design compatibility among CMOS newlineand MEMS components is imperative. Material selection for the devices considered has newlinebeen optimized by using Ashby approach.
