Abstract:
This paper presents an improved design of radio frequency (RF) microelectromechanical system (MEMS) switch having non-uniform serpentine flexure structure. An analytical modeling for spring constant of non-uniform serpentine flexure is obtained using small displacement theory. The spring constant computed analytically is compared with Finite Element Method (FEM). It is observed that in comparison to the uniform serpentine flexure reported so far, the proposed design shows a considerable decrease in spring constant