| dc.contributor.author |
Gupta, Navneet |
|
| dc.date.accessioned |
2023-02-06T10:22:33Z |
|
| dc.date.available |
2023-02-06T10:22:33Z |
|
| dc.date.issued |
2012 |
|
| dc.identifier.uri |
https://www.scientific.net/AMR.403-408.3376 |
|
| dc.identifier.uri |
http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9003 |
|
| dc.description.abstract |
In this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart. |
en_US |
| dc.language.iso |
en |
en_US |
| dc.publisher |
Trans Tech Publications Ltd |
en_US |
| dc.subject |
EEE |
en_US |
| dc.subject |
Over-Etching |
en_US |
| dc.subject |
Microcantilever |
en_US |
| dc.title |
Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856 |
en_US |
| dc.type |
Article |
en_US |