Abstract:
A solid-state vapor sensor in parallel electrode configuration was fabricated by employing 1-D TiO 2 nanorods as a sensing layer. Highly ordered and oriented TiO 2 nanorods were synthesized on a Ti substrate by using hydrothermal method. X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM) were used to characterize the TiO 2 nanorods/Ti samples. The developed Au/TiO 2 nanorods/Ti type parallel electrodes sensor demonstrated the potential of integrated operations of both resistive and capacitive changes towards various concentrations (50-300 ppm) of volatile organic compounds (VOCs) like methanol, ethanol, 2-propanol, acetone and benzene at 50 °C. The resistive response magnitude of the sensor was found to be increased from 13 % to 87% while the capacitive response magnitude of the sensor was increased from 32 % to 200%, as methanol concentration was increased from 50 ppm to 300 ppm. However, the use of both modes enhances the selectivity performance of the sensor as the resistive mode exhibited better selectivity for a lower concentration of VOCs and the capacitive mode for higher concentration of VOCs. Moreover, the sensor showed a very good stability because of low operating temperature (50°C) as well as rutile (major) phase of TiO 2 nanorods.