Department of Computer Science and Information Systems

Permanent URI for this collectionhttp://localhost:4000/handle/123456789/1928

Browse

Filters

2012 - 201912020 - 20211

Settings

Author: search.filters.author.Yenuganti, SujanSubject: search.filters.subject.Pressure sensor

Search Results

Now showing 1 - 2 of 2
  • No Thumbnail Available
    Item
    T-Shaped Resonating Beam Pressure Sensor
    (IEEE, 2012) Yenuganti, Sujan
    A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a Tshaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 μm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz
  • No Thumbnail Available
    Item
    A Differential Hall Effect Based Pressure Sensor
    (Springer, 2021-01) Yenuganti, Sujan
    This paper presents the design and simulation of a pressure sensor integrated with two identical hall effect sensors and permanent magnets arranged in a differential configuration for measuring pressure in the range of 0–20 bar. The sensor uses the deflection of a circular diaphragm with a simple rigid mechanical structure to convert the applied pressure to a differential hall voltage output. A complete analytical modelling was carried out by assuming the rigid mechanical structure as a central circular boss structure on the circular diaphragm. Numerical simulations were also carried out in COMSOL Multiphysics FEM tool to support the analytical results. Before going for actual fabrication, the optimum sensor dimensions were also fixed from both analytical modelling and numerical simulation analysis. The sensor was planned to be fabricated completely using different grades of stainless steel and hence can be used in high temperature and corrosive environments. The fabricated sensor can be of low cost, self-packaged and the differential arrangement helps in compensating for any ambient temperature variations.