BITS Faculty Publications

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    A Tri-axial Resonating Beam MEMS Accelerometer
    (Springer, 2024-07) Yenuganti, Sujan
    MEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detection
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    Experimental studies on dynamic response of piezoelectric based hemispherical resonator gyroscope
    (Emerald, 2024-08) Rao, Venkatesh K. P.; Yenuganti, Sujan
    This work measures the performance characteristics of a hemispherical resonator gyroscope (HRG) and compares it with a numerical model. This work we explore the optical and piezoelectric measurement methods to determine the resonant frequency of HRG. These experimental results are compared with their numerically obtained values. To explore the performance characteristics, the effect of varying actuation voltages on the sense mode displacement and the piezoelectric sensor output was studied in the absence of input angular rate. The structure was then subjected to range of angular rate signals, at a constant actuation voltage and the corresponding sensor response was analysed.
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    Nanoswimmer Energy Transduction System: Influence of Branching
    (Springer, 2018-10) Rathore, Jitendra S.
    Nanoswimmers are of interest among researchers for their utility in propelling nanorobots to specific target for drug delivery, nanosurgery, in vivo biomedical applications such as in treatment of brain tumor and Alzheimer’s disease and similar applications. On-board powering is the major concern for locomotion of nanoswimmer and is being considered to be addressed by energy transduction mechanism to harness energy from surrounding using energy of stochastic vibrations by electrostatic, electromagnetic, and piezoelectric means. Among all, piezoelectric is emerging as a promising conversion transduction mechanism of energy harnessing for artificial nanoswimmer. In this context, in present work, an elastic flagellum of a nanoswimmer is modeled as a cantilever beam and a simulation study is done in COMSOL. The novel design of branched flagellum is conceived, modeled, and simulated. COMSOL simulation studies have been performed to compare the effect of primary and secondary branching in flagellum design in terms of stress and electric potential. Enhancement in stress and electric potential is observed approximately 20 and 15% on increasing secondary branching uniformly on the main structure of cantilever beam towards free end and keeping primary branches constant. An enhanced stress allows for larger efficiency of conversion mechanism and, therefore, it is concluded that branching of flagellum can be pivotal in increasing on-board harnessing of energy for propulsion of nanorobots.
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    Experimental Analysis and Optimal Control of PZT Based Cantilever Beam Using Fuzzy-PID Controllers
    (IEEE, 2022) Yenuganti, Sujan
    In this study experimental analysis and control of a PZT based cantilever is performed using Fuzzy-PID controllers. Two PZT patches were attached to the rigid end of the Cantilever beam out of which one was used as an actuator and another PZT was used as a sensor. The sensor input was provided to a computer using an NI DAQ card. The sensor signal was received by the computer through LABVIEW software where the control algorithms using PID and Fuzzy-PID controller were designed. At the rigid end of the cantilever beam, a magnet was attached and an electromagnet was used as a controller for controlling the vibrations. The vibration suppression was done at the first order mode frequency of the cantilever beam and both PID and fuzzy-PID controllers show good suppression of the vibrations. However, the results show that fuzzy-PID controllers have better characteristics than PID control.
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    Performance Enhancement in Stainless Steel Pressure Sensor
    (Springer, 2020-07) Yenuganti, Sujan
    A piezoelectric resonant pressure sensor fabricated with stainless steel with a modified design to improve its performance is proposed in this work. The sensor consists of a stainless steel diaphragm, inclined trusses, hinged vertical mounts, and a resonating doubly clamped beam. The deflection of the diaphragm with applied pressure is transferred to the resonating beam via a stress transmission mechanism comprising of inclined trusses and vertical mounts. The sensor is fabricated with SS 304 grade stainless steel using electrical discharge machining (EDM) and wire-cut EDM process. The sensor was tested for its characteristics for an input pressure of 0–25 bar. The experimental results demonstrate that the proposed sensor was found to have better linearity, higher sensitivity, and low hysteresis as compared to a similar pressure sensor existing in the literature. Sensor design is simple; fabrication involves well-known machining process, self-packed, and hence cost effective.
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    Piezoelectric based Resonance Displacement sensor
    (IEEE, 2013) Yenuganti, Sujan
    The paper presents design and development of a resonance displacement sensor. The sensor is built with cantilever as a resonator with piezoelectric excitation and sensing in closed loop electronics. The sensor measures the unknown displacement with good linearity within the measurement range. The input displacement varies the length of the resonator by a fixed roller arrangement. The shift in resonance frequency for a change in displacement is detected by closed loop electronics.
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    Design and testing of piezoelectric resonant pressure sensor
    (Elsevier, 2016-10) Yenuganti, Sujan
    A stainless steel resonant pressure sensor with a new design is proposed with piezoelectric excitation and detection. The sensor consists of a sensing diaphragm, inclined trusses, vertical mounts and a resonating beam. The deflection of the diaphragm is transferred to the resonating beam via specially designed inclined trusses and vertical mounts. The analytical model of the sensor is developed using Ritz method and direct stiffness method for the non uniform sensing diaphragm and resonating beam respectively. The relation between strain due to applied pressure and change in the resonance frequency is derived. The sensor is also modelled numerically using MEMS CAD Tool CoventorWare. The sensor is fabricated with three different grades of stainless steel namely SS 304, SS 431, 15-5 PH, using Electrical Discharge Machining (EDM) and wire cut EDM process. The sensors are tested for its characteristics for an input pressure of 0–25 bar. The sensor fabricated using 15-5 PH is found to have good linearity, repeatability, higher sensitivity and low hysteresis compared to the sensors fabricated with SS 304 and SS 431. The sensor design is simple, fabrication involves well known machining process, self packed and hence cost effective.
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    Piezoelectric microresonant pressure sensor using aluminum nitride
    (SPIE, 2017-04) Yenuganti, Sujan
    This paper presents the design and fabrication of a silicon island supported resonating beam-based micropressure sensor with piezoelectric excitation and detection. The sensor consists of a silicon frame with silicon islands supporting a silicon nitride (SIN) resonating beam placed diagonally on the island in a square diaphragm made of silicon. Aluminum nitride (AlN) thin films deposited at the extreme ends of the SIN beam is used for resonant actuation and sensing. Customized process steps are followed with seven masks to fabricate the sensor, which is first of its kind in the fabrication of microresonant pressure sensors with AlN as piezoelectric material for sensing and actuating the resonating beam. Basic mechanical and electrical characterization is carried out on the unit devices individually to identify the resonance characteristics of the sensor. The results obtained from numerical simulations and experimentation are in close agreement and in the same dimensional range. Closed loop electronics are also designed and tested to vibrate the resonating beam of the unit device at its resonant frequency under no pressure load conditions, which is found to be close to the measured resonance frequency from the mechanical characterization.
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    Optimal selection of dielectric film in piezoelectric MEMS microphone
    (Springer, 2019) Gupta, Navneet
    This paper focusses on selecting the best piezoelectric material as a dielectric film using multi-criteria decision making (MCDM) material selection techniques. These techniques include Ashby’s approach and technique for order preference by similarity to an ideal solution (TOPSIS) methodology. This selection will ensure the maximized MEMS Microphone performance assuming a capacitor model based design. Several piezoelectric material properties have been identified and co-related using mathematical equations to model key output microphone device parameters like signal to noise ratio (SNR), impedance and bandwidth. Contour plots were generated to identify optimal intersection regions of different piezoelectric thin film materials based on device performance parameters as output responses and key material properties as input factors. Comparison of results from both these MCDM techniques shows that aluminum nitride (AlN) and zinc oxide (ZnO) serve as the best piezoelectric dielectric films to achieve optimal microphone performance. This outcome also considered the intrinsic material properties and fabrication compatibility with complementary metal oxide semiconductor (CMOS)-technology processing for commercial microphone applications.