Modeling and simulation of a high sensitivity mems tuning fork gyroscope

Abstract

MEMS Gyros are the emerging technology for sensing angular motion of the platform they are installed on. The biggest advantages they offer is their low size, weight, cost and power consumption. In this paper we present a mode matched MEMS Tuning Fork Gyro (TFG) which offers high sensitivity and resolution. The frequency separation between drive and sense modes is only 14Hz. The TFG displays a sensitivity of 924pm/dps and a resolution of 0.001 dps. This MEMS TFG offers high sensitivity, resolution and immunity from external vibrations, which makes it a suitable choice for any device that needs to measure and control angular motion in industrial, medical, automotive, aerospace or defence sector applications.